Film coating wafers

WaferHome can manufacture the high quality Film coating wafers

Specification for Film Coating Wafer

衬底材料(Substruct) (膜材料)Film material 
  Dimeter(直径)

Type/dopant(类型/掺杂)

Orientaion

thickness(厚度) Resistivity(电阻率) (膜材料)Film material thickness(厚度) 均匀度
单晶抛光硅片 25.4mm 50.8mm 76.5mm P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

400um+/-20 400um+/- 20 400um+/-20

0.0001 - 200 Ohm-cm /Customization

oxided layer <100nm 100nm - 300nm >1000nm <5%
100mm 125mm 150mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 525um+/-20 625um+/-20 625um+/-20 0.0001 - 200 Ohm-cm /Customization oxided layer <100nm 100nm - 300nm >1000nm <5%
200mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 725um+/-20 0.0001 - 200 Ohm-cm /Customization oxided layer <100nm 100nm - 300nm >1000nm <5%
300mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 775um+/-20 0.0001 - 200 Ohm-cm /Customization oxided layer <100nm 100nm - 300nm >1000nm <5%
单晶抛光硅片 25.4mm 50.8mm 76.5mm 100mm 125mm 150mm 200mm 300mm P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

200um+/- 20 100um+/-20 customization

0.0001 - 200 Ohm-cm /Customization

Aluminum <100nm 100nm - 300nm >1000nm <5%
25.4mm 50.8mm 76.5mm 100mm 125mm 150mm 200mm 300mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 100um+/-20 200um+/- 20 customization 0.0001 - 200 Ohm-cm /Customization Cu <100nm 100nm - 300nm >1000nm <5%
25.4mm 50.8mm 76.5mm 100mm 125mm 150mm 200mm 300mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 100um+/-20 200um+/- 20 customization 0.0001 - 200 Ohm-cm /Customization Ag <100nm 100nm - 300nm >1000nm <5%
25.4mm 50.8mm 76.5mm 100mm 125mm 150mm 200mm 300mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 100um+/-20 200um+/- 20 customization 0.0001 - 200 Ohm-cm /Customization Ti <100nm 100nm - 300nm >1000nm <5%
单晶蓝宝石晶片 25.4mm 50.8mm 76.5mm 100mm 125mm 150mm 200mm  

C A M R or special orientation

1000um 2000um customization

 

GaN 500nm Customization <5%
25.4mm 50.8mm 76.5mm 100mm 125mm 150mm 200mm   C A M R or special orientation 1000um 2000um customization   AlN <100nm 300nm >1000nm <5%
25.4mm 50.8mm 76.5mm 100mm 125mm 150mm 200mm   C A M R or special orientation 1000um 2000um customization   AlInN <100nm 300nm >1000nm <5%
25.4mm 50.8mm 76.5mm 100mm 125mm 150mm 200mm   C A M R or special orientation 1000um 2000um customization   Al <100nm 300nm >1000nm <5%
25.4mm 50.8mm 76.5mm P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

400um+/-20 400um+/- 20 400um+/-20

0.0001 - 200 Ohm-cm /Customization

GaN <100nm 300nm >1000nm TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um
100mm 125mm 150mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 525um+/-20 625um+/-20 625um+/-20 0.0001 - 200 Ohm-cm /Customization GaN <100nm 300nm >1000nm TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um
200mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 725um+/-20 0.0001 - 200 Ohm-cm /Customization GaN <100nm 300nm >1000nm TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um
300mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 775um+/-20 0.0001 - 200 Ohm-cm /Customization GaN <100nm 300nm >1000nm TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um
单晶砷化镓抛光晶片 50.8mm 76.5mm         AL    
100mm 125mm Cu  
150mm Au